Nitrogen Plasma Pretreatment of Sapphire Substrates for the GaN Buffer Growth by Remote Plasma Enhanced MOCVD
- 期刊名称MRS Proceedings
- 作者Hong Kim, Min; Sone, Cheolsoo; Hyung Yi, Jae; Ok Heur, Soun; Yoon, Euijoon
- 卷第449卷
- 电子ISSN1946-4274
- 文件大小1266.02KB
- 发表时间1996-1
- DOI10.1557/proc-449-53
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