Polycrystalline Silicon Grown on Porous Silicon-on-Insulator Substrates
- 期刊名称MRS Proceedings
- 作者Hsu, Klaus Y.J.; Lee, C. H.; Yeh, C. C.
- 卷第452卷
- 电子ISSN1946-4274
- 文件大小1279.23KB
- 发表时间1996-1
- DOI10.1557/proc-452-1007
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