Crystallization of Si(1-yCy Films by Excimer Laser Annealing: Characterization of the Microstructure of the Films
- 期刊名称MRS Proceedings
- 作者Boher, P.; Stehle, M.; Stehle, J. L.; Fogarassy, E.; Grob, J. J.; Grob, A.; Muller, D.
- 卷第452卷
- 电子ISSN1946-4274
- 文件大小427.98KB
- 发表时间1996-1
- DOI10.1557/proc-452-959
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