Argon metastable densities in radio frequency Ar, Ar/O2 and Ar/CF4 electrical discharges
- 作者Rauf, Shahid; Kushner, Mark J.
- 卷第82卷
- 期第6期
- 印刷ISSN0021-8979
- 文件大小443.88KB
- 发表时间1997
- DOI10.1063/1.366111
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