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High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

Ericson, Fredric; Greek, Staffan; Söderkvist, Jan; Schweitz, Jan-Åke

期刊名称Journal of Micromechanics and Microengineering
作者Ericson, Fredric; Greek, Staffan; Söderkvist, Jan; Schweitz, Jan-Åke
卷第7卷
期第1期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小448.78KB
发表时间1997-03-01
DOI10.1088/0960-1317/7/1/006
页码30-36

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