Sub-10 nm imprint lithography and applications
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Chou, Stephen Y.
- 卷第15卷
- 期第6期
- 印刷ISSN0734-211X
- 文件大小4235.80KB
- 发表时间1997-11
- DOI10.1116/1.589752
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