Photoresists for 193-nm lithography
- 作者R. D. Allen; G. M. Wallraff; D. C. Hofer; R. R. Kunz
- 卷第41卷
- 期第1期
- 文件大小1094.99KB
- 发表时间1997
- DOI10.1147/rd.411.0095
- 页码95-104
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