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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - High-order micromechanical electronic filters

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - High-order micromechanical electronic filters

Wang, K.; Nguyen, C.T.-C.
  • 作者Wang, K.; Nguyen, C.T.-C.
  • 文件大小773.30KB
  • 发表时间1997
  • DOI10.1109/memsys.1997.581759
  • 页码25-30
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