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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Ion implant COO modeling: does it give us what we want?

[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Ion implant COO modeling: does it give us what we want?

Beeston, B.E.P.

作者Beeston, B.E.P.
文件大小512.59KB
发表时间1997
DOI10.1109/iit.1996.586403
页码474-477

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