Passivation of GaAs/AlGaAs heterojunction bipolar transistors by S[sub 2]Cl[sub 2] solution
Cao, Xian-an; Hou, Xiao-yuan; Chen, Xi-ying; Li, Zhe-shen; Su, Run-zhou; Ding, Xun-min; Wang, Xun
- 期刊名称Applied Physics Letters
- 作者Cao, Xian-an; Hou, Xiao-yuan; Chen, Xi-ying; Li, Zhe-shen; Su, Run-zhou; Ding, Xun-min; Wang, Xun
- 卷第70卷
- 期第6期
- 印刷ISSN0003-6951
- 文件大小431.09KB
- 发表时间1997
- DOI10.1063/1.118268