Diagnosing SiO[sub 2] contact etch stop with optical emission
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者McNevin, S. C.
- 卷第15卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小382.63KB
- 发表时间1997-5
- DOI10.1116/1.580701
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