Athermal Annealing of Silicon
- 期刊名称Physical Review Letters
- 作者Grun, J.; Manka, C. K.; Hoffman, C. A.; Meyer, J. R.; Glembocki, O. J.; Kaplan, R.; Qadri, S. B.; Skelton, E. F.; Donnelly, D.; Covington, B.
- 卷第78卷
- 期第8期
- 印刷ISSN0031-9007
- 电子ISSN1079-7114
- 文件大小92.49KB
- 发表时间1997-2-24
- DOI10.1103/PhysRevLett.78.1584
- 页码1584-1587
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