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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Understanding implant damage by implant channeling profile measurements

[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Understanding implant damage by implant channeling profile measurements

Packan, P.; Kennel, H.; Thompson, S.; Corcoran, S.; Taylor, M.
  • 作者Packan, P.; Kennel, H.; Thompson, S.; Corcoran, S.; Taylor, M.
  • 文件大小357.52KB
  • 发表时间1997
  • DOI10.1109/iit.1996.586436
  • 页码539-542
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