Excimer laser ablation of aluminum nitride
- 期刊名称Journal of Materials Research
- 作者Lumpp, Janet K.; Allen, Susan D.
- 卷第12卷
- 期第1期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小236.12KB
- 发表时间1997-1
- DOI10.1557/jmr.1997.0029
- 页码218-225
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