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X-ray stress measurement for TiN films evaporated by PVD

X-ray stress measurement for TiN films evaporated by PVD

Shouchi Ejiri; Toshihiko Sasaki; Yukio Hirose

作者Shouchi Ejiri; Toshihiko Sasaki; Yukio Hirose
卷第307卷
印刷ISSN0040-6090
文件大小337.39KB
发表时间1997
DOI10.1016/s0040-6090(97)00321-0
页码178-182

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