Diagnostics of Fluorine Negative Ions by Laser Photodetachment Combined with a Heated Probe in High-Density CF 4 Plasmas
- 作者N. Takada; D. Hayashi; K. Sasaki; K. Kadota
- 文件大小676.51KB
- 发表时间1997
- DOI10.1143/JJAP.36.L1702
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