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Effect of a Buffer Layer on the Surface Acoustic Wave Characteristics of
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Film/Buffer Layer/Semiconductor Substrate Structures

Effect of a Buffer Layer on the Surface Acoustic Wave Characteristics of P b ( Z r , T i ) O ₃ Film/Buffer Layer/Semiconductor Substrate Structures

Shih, Wen-Ching; Wu, Mu-Shiang

期刊名称Japanese Journal of Applied Physics
作者Shih, Wen-Ching; Wu, Mu-Shiang
卷第36卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小925.78KB
发表时间1997-1-15
DOI10.1143/jjap.36.203
页码203-208

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