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Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm

Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm

Quanbo Zou; Zhijian Li; Litian Liu

作者Quanbo Zou; Zhijian Li; Litian Liu
卷第63卷
期第3期
印刷ISSN0924-4247
文件大小1724.64KB
发表时间1997
DOI10.1016/s0924-4247(97)80507-9
页码209-215

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