[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection
- 作者Mita, Y.; Konishi, S.; Fujita, H.
- 卷第1卷
- 文件大小444.13KB
- 发表时间1997
- DOI10.1109/sensor.1997.613575
- 页码37-40
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