A PAIR-DIFFUSION MODEL FOR ARSENIC IN SILICON CONSIDERING ARSENIC DEACTTVATION-INDUCEDINTERSTITIAL-SDLICON EMISSION
- 期刊名称MRS Proceedings
- 作者Hiroi, Masayuki; Ikezawa, Takeo; Hane, Masami; Matsumoto, Hiroshi
- 卷第469卷
- 电子ISSN1946-4274
- 文件大小419.44KB
- 发表时间1997-1
- DOI10.1557/proc-469-371