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Growth and Nitridation of Silicon-Dioxide Films on Silicon-Carbide

Sweatman, Denis; Dimitrijev, Sima; Li, Hui-Feng; Tanner, Philip; Barry Harrison, H.

期刊名称MRS Proceedings
作者Sweatman, Denis; Dimitrijev, Sima; Li, Hui-Feng; Tanner, Philip; Barry Harrison, H.
卷第470卷
电子ISSN1946-4274
文件大小443.96KB
发表时间1997-1
DOI10.1557/proc-470-413