Fracture Tests Of Polysilicon Film
- 期刊名称MRS Proceedings
- 作者Sharpe, W. N.; Yuan, B.; Edwards, R. L.
- 卷第505卷
- 电子ISSN1946-4274
- 文件大小1414.31KB
- 发表时间1997-1
- DOI10.1557/proc-505-51
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