Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl

• 作者Penelope A. Lane; Peter E.Oliver; Peter J. Wright; Christopher L. Reeves; Anthony D. Pitt; Brian Cockayne
• 卷第4卷
• 期第5期
• 印刷ISSN0948-1907
• 电子ISSN1521-3862
• 文件大小299.58KB
• 发表时间1998
• DOI10.1002/(sici)1521-3862(199810)04:05<183::aid-cvde183>3.0.co;2-m
• 页码183-186