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High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications

High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications

W. Spiess; S. Funato; Y. Kinoshita; Y. Nozaki; G. Pawlowski

作者W. Spiess; S. Funato; Y. Kinoshita; Y. Nozaki; G. Pawlowski
印刷ISSN0167-9317
文件大小335.25KB
发表时间1998
DOI10.1016/s0167-9317(98)00078-1
页码339-342

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