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[IEEE ICMTS 1998. International Conference on Microelectronic Test Structures - Kanazawa, Japan (23-26 March 1998)] ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) - Wafer level defect density distribution using checkerboard test structures

[IEEE ICMTS 1998. International Conference on Microelectronic Test Structures - Kanazawa, Japan (23-26 March 1998)] ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) - Wafer level defect density distribution using checkerboard test structures

Hess, C.; Weiland, L.H.

作者Hess, C.; Weiland, L.H.
文件大小844.00KB
发表时间1998
DOI10.1109/icmts.1998.688050
页码101-106

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