Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- 期刊名称Journal of Microelectromechanical Systems
- 作者Chui, B.W.; Stowe, T.D.; Yongho Sungtaek Ju, ; Goodson, K.E.; Kenny, T.W.; Mamin, H.J.; Terris, B.D.; Ried, R.P.; Rugar, D.
- 卷第7卷
- 期第1期
- 印刷ISSN1057-7157
- 文件大小364.65KB
- 发表时间1998-3
- DOI10.1109/84.661386
- 页码69-78
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