A novel integrated silicon capacitive microphone-floating electrode "electret" microphone (FEEM)

Quanbo Zou, ; Zhimin Tan, ; Zhenfeng Wang, ; Jiangtao Pang, ; Xin Qian, ; Qingxin Zhang, ; Rongming Lin, ; Sung Yi, ; Haiqing Gong, ; Litian Liu, ; Zhijian Li,

期刊名称Journal of Microelectromechanical Systems
作者Quanbo Zou, ; Zhimin Tan, ; Zhenfeng Wang, ; Jiangtao Pang, ; Xin Qian, ; Qingxin Zhang, ; Rongming Lin, ; Sung Yi, ; Haiqing Gong, ; Litian Liu, ; Zhijian Li,
卷第7卷
期第2期
印刷ISSN1057-7157
文件大小345.38KB
发表时间1998-6
DOI10.1109/84.679385
页码224-234

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A novel integrated silicon capacitive microphone-floating electrode "electret" microphone (FEEM)