![[IEEE 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - Como, Italy (24-26 April 2006)] 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - Application of an Innovative Method for the Fatigue Characterisation of 15 μm Thick Epitaxial Polysilicon]()
[IEEE 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - Como, Italy (24-26 April 2006)] 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - Application of an Innovative Method for the Fatigue Characterisation of 15 μm Thick Epitaxial PolysiliconFerraris, E.; Fassi, I.; Del Sarto, M. · 2006