[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Pressure based mass flow control for ion implant SDS applications
- 作者Brown, R.L.; Schwartz, J.M.
- 卷第1卷
- 文件大小430.93KB
- 发表时间1998
- DOI10.1109/iit.1999.812130
- 页码369-372
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