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Simultaneous determination of the compositions and thicknesses of a multilayer film using spectroreflectometry

Simultaneous determination of the compositions and thicknesses of a multilayer film using spectroreflectometry

Weyburne, David W.; Paduano, Qing S.

期刊名称Journal of Applied Physics
作者Weyburne, David W.; Paduano, Qing S.
卷第84卷
期第6期
印刷ISSN0021-8979
文件大小290.74KB
发表时间1998
DOI10.1063/1.368503

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