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Diffusion behavior study of Yb[sup +] and Er[sup +] implanted into polyimide (C[sub 22]H[sub 10]N[sub 2]O[sub 5])[sub n]

Diffusion behavior study of Yb[sup +] and Er[sup +] implanted into polyimide (C[sub 22]H[sub 10]N[sub 2]O[sub 5])[sub n]

Wang, Ke-Ming

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Wang, Ke-Ming
卷第16卷
期第5期
印刷ISSN0734-2101
文件大小389.13KB
发表时间1998-9
DOI10.1116/1.581461

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