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[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - A self-aligned silicide technology with the Mo/Ti bilayer system

[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - A self-aligned silicide technology with the Mo/Ti bilayer system

Kaplan, W.; Mouroux, A.; Zhang, S.L.
  • 作者Kaplan, W.; Mouroux, A.; Zhang, S.L.
  • 文件大小113.78KB
  • 发表时间1998
  • DOI10.1109/mam.1998.887533
  • 页码116-117
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