Effect of deposition temperature and growth rate on the bond structure of hydrogen free carbon films
- 期刊名称Journal of Applied Physics
- 作者Koskinen, J.; Hirvonen, J.-P.; Keränen, J.
- 卷第84卷
- 期第1期
- 印刷ISSN0021-8979
- 文件大小331.60KB
- 发表时间1998
- DOI10.1063/1.368091
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