Diagnostic technique for measuring plasma parameters near surfaces in radio frequency discharges
- 期刊名称Applied Physics Letters
- 作者Rauf, Shahid; Kushner, Mark J.
- 卷第73卷
- 期第19期
- 印刷ISSN0003-6951
- 文件大小268.13KB
- 发表时间1998
- DOI10.1063/1.122572
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