Determination of the emission characteristics of evaporation sources and of the thickness and composition of mixed layers
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Podolesheva, I.
- 卷第16卷
- 期第2期
- 印刷ISSN0734-2101
- 文件大小336.52KB
- 发表时间1998-3
- DOI10.1116/1.581086
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