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[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Integration evaluation of low permittivity silicon based spin an materials as IMD

[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Integration evaluation of low permittivity silicon based spin an materials as IMD

Pires, F.; Noel, P.; Lecornec, Ch.; Passemard, G.

作者Pires, F.; Noel, P.; Lecornec, Ch.; Passemard, G.
文件大小131.49KB
发表时间1998
DOI10.1109/mam.1998.887515
页码68-70

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