Analysis of local lattice strain around oxygen precipitates in silicon crystals using CBED technique
- 作者Mitsuharu Yonemura; Koji Sueoka; Kazuhito Kamei
- 印刷ISSN0169-4332
- 文件大小706.75KB
- 发表时间1998
- DOI10.1016/s0169-4332(98)00052-x
- 页码208-213
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