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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Effect of nitrogen doping on the structure and properties of tetrahedral amorphous carbon films

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Effect of nitrogen doping on the structure and properties of tetrahedral amorphous carbon films

Chen, Z.Y.; Yu, Y.H.; Zhao, J.P.; Shi, T.S.; Liu, X.H.; Zou, S.C.
  • 作者Chen, Z.Y.; Yu, Y.H.; Zhao, J.P.; Shi, T.S.; Liu, X.H.; Zou, S.C.
  • 卷第2卷
  • 文件大小366.43KB
  • 发表时间1998
  • DOI10.1109/iit.1998.813888
  • 页码1155-1158
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