Residual Gases and Their Influence on Processes in the Atmospheric Rapid Thermal Processing Equipment
- 期刊名称MRS Proceedings
- 作者Hu, Yao Zhi; Tay, Sing Pin
- 卷第525卷
- 电子ISSN1946-4274
- 文件大小766.91KB
- 发表时间1998-1
- DOI10.1557/proc-525-45
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