Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (Elo) of GaN Using Tungsten Mask

Kawaguchi, Yasutoshi; Nambu, Shingo; Sone, Hiroki; Yamaguchi, Masahito; Miyake, Hideto; Hiramatsu, Kazumasa; Sawaki, Nobuhiko; Iyechika, Yasushi; Maeda, Takayoshi

期刊名称MRS Proceedings
作者Kawaguchi, Yasutoshi; Nambu, Shingo; Sone, Hiroki; Yamaguchi, Masahito; Miyake, Hideto; Hiramatsu, Kazumasa; Sawaki, Nobuhiko; Iyechika, Yasushi; Maeda, Takayoshi
卷第537卷
电子ISSN1946-4274
文件大小1507.87KB
发表时间1998-1
DOI10.1557/proc-537-g4.1

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Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (Elo) of GaN Using Tungsten Mask