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SPIE Proceedings [SPIE Photonics China '98 - Beijing, China (Wednesday 16 September 1998)] Automated Optical Inspection for Industry: Theory, Technology, and Applications II - <title>Robust phase-unwrapping algorithm for flat measurement in phase-stepping interferometry</title>

SPIE Proceedings [SPIE Photonics China '98 - Beijing, China (Wednesday 16 September 1998)] Automated Optical Inspection for Industry: Theory, Technology, and Applications II - Robust phase-unwrapping algorithm for flat measurement in phase-stepping interferometry

Wei, Chunlong; Chen, Mingyi; Hou, Weidong; Guo, Hongwei; Wang, Zhijiang; Ye, Shenghua
  • 作者Wei, Chunlong; Chen, Mingyi; Hou, Weidong; Guo, Hongwei; Wang, Zhijiang; Ye, Shenghua
  • 卷第3558卷
  • 印刷ISSN0277-786X
  • 文件大小455.01KB
  • 发表时间1998
  • DOI10.1117/12.318442
  • 页码480-486
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