Two-Dimensional Experiment and Simulation of Etching Process.
- 期刊名称Transactions of the Japan Society of Mechanical Engineers Series B
- 作者SHITAMOTO, Hidenori; EMA, Mitsuyoshi; NAGATANI, Takashi
- 卷第64卷
- 期第623期
- 印刷ISSN0387-5016
- 电子ISSN1884-8346
- 文件大小718.12KB
- 发表时间1998
- DOI10.1299/kikaib.64.2155
- 页码2155-2160
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