[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Aluminium via-fill at elevated pressure and temperature

Janssen, G. C. A. M.; Jongste, J. F.; Lokker, J. P.; Verbruggen, A. H.; Radelaar, S.

作者Janssen, G. C. A. M.; Jongste, J. F.; Lokker, J. P.; Verbruggen, A. H.; Radelaar, S.
文件大小1157.27KB
发表时间1998
DOI10.1063/1.54655
页码349-358

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