Oxygen and Erbium related donor centers in Czochralski grown silicon implanted with erbium

V. V. Emtsev; V. V. Emtsev; D. S. Poloskin; E. I. Shek; N. A. Sobolev; J. Michel; L. C. Kimerling

作者V. V. Emtsev; V. V. Emtsev; D. S. Poloskin; E. I. Shek; N. A. Sobolev; J. Michel; L. C. Kimerling
卷第33卷
期第10期
印刷ISSN1063-7826
电子ISSN1090-6479
文件大小65.63KB
发表时间1999-10
DOI10.1134/1.1187870
页码1084-1087

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