Regular relief on a silicon surface as a structural defect getter
- 作者L. S. Berman; I. V. Grekhov; L. S. Kostina; E. I. Belyakova; E. D. Kim; S. C. Kim
- 卷第25卷
- 期第1期
- 印刷ISSN1063-7850
- 电子ISSN1090-6533
- 文件大小65.32KB
- 发表时间1999-01
- DOI10.1134/1.1262345
- 页码32-34
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