Determination of Oxide Growth Stress by a Novel Deflection Method
- 作者Meishuan Li; Tiefan Li; Wei Gao; Zhenyu Liu
- 卷第51卷
- 印刷ISSN0030-770X
- 电子ISSN1573-4889
- 文件大小252.58KB
- 发表时间1999-06-1
- DOI10.1023/a:1018878908434
- 页码333-351
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