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Angular and energy dependence of the ion beam oxidation of Si using oxygen ions from a duoplasmatron source

Angular and energy dependence of the ion beam oxidation of Si using oxygen ions from a duoplasmatron source

Deenapanray, Prakash N. K.; Petravic, Mladen

期刊名称Surface and Interface Analysis
作者Deenapanray, Prakash N. K.; Petravic, Mladen
卷第27卷
期第2期
印刷ISSN0142-2421
电子ISSN1096-9918
文件大小174.76KB
发表时间1999-02
DOI10.1002/(sici)1096-9918(199902)27:2<92::aid-sia472>3.0.co;2-v
页码92-97

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