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[IEEE 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual - San Diego, CA, USA (23-25 March 1999)] 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) - Performance and reliability of a new MEMS electrostatic lateral output motor

[IEEE 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual - San Diego, CA, USA (23-25 March 1999)] 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) - Performance and reliability of a new MEMS electrostatic lateral output motor

Patton, S.T.; Cowan, W.D.; Zabinski, J.S.

作者Patton, S.T.; Cowan, W.D.; Zabinski, J.S.
文件大小1280.09KB
发表时间1999
DOI10.1109/RELPHY.1999.761610
页码179-188

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