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[IEEE 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual - San Diego, CA, USA (23-25 March 1999)] 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) - Reliability methodology for prediction of micromachined accelerometer stiction

[IEEE 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual - San Diego, CA, USA (23-25 March 1999)] 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) - Reliability methodology for prediction of micromachined accelerometer stiction

Hartzell, A.; Woodilla, D.

作者Hartzell, A.; Woodilla, D.
文件大小424.62KB
发表时间1999
DOI10.1109/relphy.1999.761613
页码202-205

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