Extraction of wafer-level defect density distributions to improve yield prediction
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Hess, C.; Weiland, L.H.
- 卷第12卷
- 期第2期
- 印刷ISSN0894-6507
- 文件大小676.56KB
- 发表时间1999-5
- DOI10.1109/66.762875
- 页码175-183
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